{"id":128577,"date":"1996-01-01T00:00:00","date_gmt":"1996-01-01T00:00:00","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/laminas-delgadas-de-sinxh-y-siox-depositadas-mediante-la-tecnica-ecr-cvd-para-su-aplicacion-en-estructuras-mis\/"},"modified":"1996-01-01T00:00:00","modified_gmt":"1996-01-01T00:00:00","slug":"laminas-delgadas-de-sinxh-y-siox-depositadas-mediante-la-tecnica-ecr-cvd-para-su-aplicacion-en-estructuras-mis","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/fisica\/laminas-delgadas-de-sinxh-y-siox-depositadas-mediante-la-tecnica-ecr-cvd-para-su-aplicacion-en-estructuras-mis\/","title":{"rendered":"Laminas delgadas de sinx:h y siox depositadas mediante la tecnica ecr-cvd para su aplicacion en estructuras mis."},"content":{"rendered":"<h2>Tesis doctoral de <strong> Silvia Garcia Sanchez <\/strong><\/h2>\n<p>La memoria presentada constituye un estudio en profundidad de la tecnica electron-cyclotron resonance de deposito de laminas delgadas de los aislantes sinx: h y siox. Se han analizado los principales parametros de produccion que afectan a las propiedades de las laminas, como son la potencia de microondas, la temperatura del portasustratos, la relacion de flujos de los gases (n2\/sihy para el sinx:h; 02\/sihy para el siox) y la presion total en la camara. Se han estudiado las principales caracteristicas fisicas de las laminas en funcion de tales parametros, encontrandose las condiciones para obtener caracteristicas optimas. Se han aplicado estas laminas a la realizacion y caracterizacion de estructuras mis sobre si y sobre inp. Se han obtenido caracteristicas c-v sobre ambos tipos de estructuras de las mejores encontradas en la literatura, siendo factible la utilizacion de tales estructuras en dispositivos de efecto campo.<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Laminas delgadas de sinx:h y siox depositadas mediante la tecnica ecr-cvd para su aplicacion en estructuras mis.<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Laminas delgadas de sinx:h y siox depositadas mediante la tecnica ecr-cvd para su aplicacion en estructuras mis. <\/li>\n<li><strong>Autor:<\/strong>\u00a0 Silvia Garcia Sanchez <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Complutense de Madrid<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 01\/01\/1996<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li>German Gonzalez Diaz<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal: Juan  Manuel Rojo  Alaminos <\/li>\n<li>Joan Ramon Morante Lleonart (vocal)<\/li>\n<li>Jos\u00e9 Mar\u00eda Albella Martin (vocal)<\/li>\n<li>Enrique Iborra Grau (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Silvia Garcia Sanchez La memoria presentada constituye un estudio en profundidad de la tecnica electron-cyclotron resonance de [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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