{"id":132252,"date":"1996-01-01T00:00:00","date_gmt":"1996-01-01T00:00:00","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/piezorresistividad-en-peliculas-delgadas-de-silicio-policristalino-para-la-determinacion-de-presion\/"},"modified":"1996-01-01T00:00:00","modified_gmt":"1996-01-01T00:00:00","slug":"piezorresistividad-en-peliculas-delgadas-de-silicio-policristalino-para-la-determinacion-de-presion","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/fisica\/piezorresistividad-en-peliculas-delgadas-de-silicio-policristalino-para-la-determinacion-de-presion\/","title":{"rendered":"Piezorresistividad en peliculas delgadas de silicio policristalino para la determinacion de presion."},"content":{"rendered":"<h2>Tesis doctoral de <strong> Isabel Obieta Vilallonga <\/strong><\/h2>\n<p>Desde sectores con un alto indice de demanda potencial de microsensores como el del automovil o el de electrodomestico, se requieren dispositivos para la medida de presion caracterizados por: un bajo coste; altas temperaturas de operacion y altas especificaciones.  en este sentido, el silicio policristalino constituye una importante alternativa piezorresistiva. Asi, el presente trabajo, se ha centrado en el desarrollo de un proceso de fabricacion de peliculas delgadas de silicio policristalino dopado y la optimizacion de sus propiedades piezorresistivas en relacion con la determinacion de presion. En este sentido, la seleccion de un proceso de fabricacion basado en sputtering, el establecimiento de procesos de dopado y la realizacion de ensayos que midan las propiedades piezorresistivas y caractericen fisica y microestructuralmente dichas peliculas han permitido establecer una interrelacion entre las propiedades electricas y microstucturales como analisis profundo de los mecanismos que influyen en la piezorresistividad. Las caracteristicas en las que se ha centrado la optimizacion han sido: sensibilidad a la deformacion y a la temperatura. Los resultado experimentales obtenidos sobre dichas peliculas han sido validados en estructuras formadas por silicio monocristalino micromecanizado y oxidado con pelicula delgada de polisilicio.<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Piezorresistividad en peliculas delgadas de silicio policristalino para la determinacion de presion.<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Piezorresistividad en peliculas delgadas de silicio policristalino para la determinacion de presion. <\/li>\n<li><strong>Autor:<\/strong>\u00a0 Isabel Obieta Vilallonga <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Navarra<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 01\/01\/1996<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li>Javier Gracia Gaudo<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal: Manuel Fuentes Perez <\/li>\n<li>Santiago Alvarez Perez (vocal)<\/li>\n<li>Juan  Andr\u00e9s De Agapito Serrano (vocal)<\/li>\n<li>Javier Gutierrez Monreal (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Isabel Obieta Vilallonga Desde sectores con un alto indice de demanda potencial de microsensores como el del [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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