{"id":138183,"date":"2026-01-12T17:33:18","date_gmt":"2026-01-12T17:33:18","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/grabado-seco-de-gaas-influencia-del-bombardeo-ionico\/"},"modified":"2026-01-12T17:33:18","modified_gmt":"2026-01-12T17:33:18","slug":"grabado-seco-de-gaas-influencia-del-bombardeo-ionico","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/fisica\/grabado-seco-de-gaas-influencia-del-bombardeo-ionico\/","title":{"rendered":"Grabado seco de gaas: influencia del bombardeo ionico."},"content":{"rendered":"<h2>Tesis doctoral de <strong>  Villalvilla Soria Jos\u00e9 Moises <\/strong><\/h2>\n<p>En esta tesis se presenta un estudio del efecto del bombardeo ionico sobre el grabado seco de gaas con haces ionicos anchos procedentes de descargas de mezcla de gases ch4\/h2 utilizando la tecnica de grabado por haz ionico reactivo (ribe). Se realiza un estudio de la fisica del sistema grabador por haz de iones disponible en el laboratorio, describiendo su instrumentacion y operacion, encontrandose unos valores experimentales de intensidad del haz comprendidos entre 5 y 60 ma con una densidad de corriente en el centro del haz entre 0.05 y 1.8 ma\/cm2. Se muestran los resultados experimentales del grabado de gaas, tanto para el caso de trabajar con un gas inerte, ar (rendimiento de grabado= 1900 a\/min\/ma\/cm2), como para una mezcla de gases reactivos, ch4\/h2, encontrandose en este ultimo caso 3 comportamientos diferentes: bien existencia de un grabado (ritmo = 100 a\/min), bien existencia de un deposito carbonoso. Se propone un modelo sencillo para explicar el mecanismo de grabado de gaas por un haz de iones de ch4\/h2 basado en la formacion de un film superficial sobre el blanco y que este al ser bombardeado potenciara la reaccion quimica interficial entre film y sustrato.  por ultimo, se presenta un resumen y las principales conclusiones de esta tesis, junto con su proyeccion futura.<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Grabado seco de gaas: influencia del bombardeo ionico.<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Grabado seco de gaas: influencia del bombardeo ionico. <\/li>\n<li><strong>Autor:<\/strong>\u00a0  Villalvilla Soria Jos\u00e9 Moises <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Alicante<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 01\/01\/1992<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li> Valles Abarca Jos\u00e9 Antonio<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal: Angel Linares Solano <\/li>\n<li>Carlos Dominguez (vocal)<\/li>\n<li>Miguel \u00e1ngel Yus Astiz (vocal)<\/li>\n<li>Dolores Golmayo (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Villalvilla Soria Jos\u00e9 Moises En esta tesis se presenta un estudio del efecto del bombardeo ionico sobre [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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