{"id":140996,"date":"2026-01-12T17:58:51","date_gmt":"2026-01-12T17:58:51","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/diseno-y-caracterizacion-del-proceso-de-deposicion-por-lpcvd-del-sio2-dopado-para-su-utilizacion-en-tecnologias-ulsi\/"},"modified":"2026-01-12T17:58:51","modified_gmt":"2026-01-12T17:58:51","slug":"diseno-y-caracterizacion-del-proceso-de-deposicion-por-lpcvd-del-sio2-dopado-para-su-utilizacion-en-tecnologias-ulsi","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/fisica\/diseno-y-caracterizacion-del-proceso-de-deposicion-por-lpcvd-del-sio2-dopado-para-su-utilizacion-en-tecnologias-ulsi\/","title":{"rendered":"Dise\u00f1o y caracterizacion del proceso de deposicion por lpcvd del sio2 dopado para su utilizacion en tecnolog\u00edas ulsi."},"content":{"rendered":"<h2>Tesis doctoral de <strong> Elias Paule Vazquez <\/strong><\/h2>\n<p>Se ha dise\u00f1ado un reactor para la deposicion del oxido de silicio dopado con boro y fosforo en substratos (*) de 150 mm de diametro y para ser utilizado en tecnolog\u00edas submicronicas. Los reactivos utilizados han sido tmb, teos, ph3 y o2; la reaccion se activo termicamente y fue realizada a baja presion (lpcvd). Las propiedades de este material (bpteos) son sensiblemente superiores al material que se obtiene de la reaccion quimica sih4, ph3, b2h6 y o2; bpsg; y que se utiliza tradicionalmente en tecnolog\u00edas superiores a la micra. Por ello este material (bpteos) es factiale de ser utilizado en tecnolog\u00edas suamicronicas.<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Dise\u00f1o y caracterizacion del proceso de deposicion por lpcvd del sio2 dopado para su utilizacion en tecnolog\u00edas ulsi.<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Dise\u00f1o y caracterizacion del proceso de deposicion por lpcvd del sio2 dopado para su utilizacion en tecnolog\u00edas ulsi. <\/li>\n<li><strong>Autor:<\/strong>\u00a0 Elias Paule Vazquez <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Aut\u00f3noma de Madrid<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 01\/01\/1992<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li> Martinez Duart Jos\u00e9 Manuel<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal: Juan Piqueras Piqueras <\/li>\n<li>Emilio Martinez Gutierrez (vocal)<\/li>\n<li> Aldella Martin J. Mar\u00eda (vocal)<\/li>\n<li>Domingo Gonzalez (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Elias Paule Vazquez Se ha dise\u00f1ado un reactor para la deposicion del oxido de silicio dopado con [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"footnotes":""},"categories":[10426,199,1008],"tags":[255709,114379,255708,56298,14568,15450],"class_list":["post-140996","post","type-post","status-publish","format-standard","hentry","category-dielectricos","category-fisica","category-fisica-del-estado-solido","tag-aldella-martin-j-maria","tag-domingo-gonzalez","tag-elias-paule-vazquez","tag-emilio-Martinez-gutierrez","tag-juan-piqueras-piqueras","tag-Martinez-duart-jose-manuel"],"_links":{"self":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/posts\/140996","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/comments?post=140996"}],"version-history":[{"count":0,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/posts\/140996\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/media?parent=140996"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/categories?post=140996"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/tags?post=140996"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}