{"id":141203,"date":"2026-01-12T18:00:25","date_gmt":"2026-01-12T18:00:25","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/contribucion-a-la-tecnologia-de-fabricacion-de-modfets-submicronicos-sobre-gaas\/"},"modified":"2026-01-12T18:00:25","modified_gmt":"2026-01-12T18:00:25","slug":"contribucion-a-la-tecnologia-de-fabricacion-de-modfets-submicronicos-sobre-gaas","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/fisica\/contribucion-a-la-tecnologia-de-fabricacion-de-modfets-submicronicos-sobre-gaas\/","title":{"rendered":"Contribucion a la tecnolog\u00eda de fabricacion de modfets submicronicos sobre gaas"},"content":{"rendered":"<h2>Tesis doctoral de <strong>  Lopez Rebollal Eduardo L. <\/strong><\/h2>\n<p>El nucleo tematico de esta tesis se centra en la problematica tecnologica que presenta la fabricacion de transistores submicronicos tipo modfet sobre estructuras algaas\/gaas y algaas\/ingaas\/gaas, para aplicaciones de muy alta frecuencia. La tesis se ha organizado en tres partes. La primera es una introduccion general al tema en la que se comentan los modos de funcionamiento de los dispositivos. La segunda parte constituye la parte mas importante del trabajo, y en ella se describen todos los procesos tecnologicos necesarios para la fabricacion de los dispositivos a partir del material base. En la tercera y ultima parte se presentan los resultados experimentales que se obtuvieron en los distintos tipos de transistores fabricados. En la parte de la tecnolog\u00eda se pone especial interes en los procesos basicos de transferencia de geometrias, aislamiento de mesas, contactos ohmicos, rebaje y fabricacion de puerta. Para la escritura de geometrias se ha utilizado fundamentalmente un sistema de litografia por haz de electrones. La tercera parte se dedica a la descripcion de los resultados obtenidos. Los parametros que se estudiaron fueron, entre otros, la longitud de puerta, orientacion cristalina del dispositivo, anchura de puerta, efecto de las resistencias de acceso.<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Contribucion a la tecnolog\u00eda de fabricacion de modfets submicronicos sobre gaas<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Contribucion a la tecnolog\u00eda de fabricacion de modfets submicronicos sobre gaas <\/li>\n<li><strong>Autor:<\/strong>\u00a0  Lopez Rebollal Eduardo L. <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Polit\u00e9cnica de Madrid<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 01\/01\/1992<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li>Elias Mu\u00f1oz Merino<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal: Enrique Calleja Pardo <\/li>\n<li>German Gonzalez Diaz (vocal)<\/li>\n<li>Miguel Aguilar Fernandez (vocal)<\/li>\n<li>Miguel Lopez Coronado (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Lopez Rebollal Eduardo L. El nucleo tematico de esta tesis se centra en la problematica tecnologica que [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"footnotes":""},"categories":[332,3705,2675,39565,199,16008,3706],"tags":[14753,5384,6242,255942,30700,12555],"class_list":["post-141203","post","type-post","status-publish","format-standard","hentry","category-ciencias-tecnologicas","category-dispositivos-semiconductores","category-electronica","category-elementos-de-circuitos","category-fisica","category-politecnica-de-madrid","category-tecnologia-electronica","tag-elias-munoz-merino","tag-enrique-calleja-pardo","tag-german-gonzalez-diaz","tag-lopez-rebollal-eduardo-l","tag-miguel-aguilar-fernandez","tag-miguel-lopez-coronado"],"_links":{"self":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/posts\/141203","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/comments?post=141203"}],"version-history":[{"count":0,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/posts\/141203\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/media?parent=141203"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/categories?post=141203"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/tags?post=141203"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}