{"id":152518,"date":"2026-01-12T16:41:12","date_gmt":"2026-01-12T16:41:12","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/deposicion-de-nitruro-de-silicio-por-deposicion-quimica-en-fase-vapor-asistida-por-plasma-pecvd-influencia-de-los-gases-precursores\/"},"modified":"2026-01-12T16:41:12","modified_gmt":"2026-01-12T16:41:12","slug":"deposicion-de-nitruro-de-silicio-por-deposicion-quimica-en-fase-vapor-asistida-por-plasma-pecvd-influencia-de-los-gases-precursores","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/fisica\/deposicion-de-nitruro-de-silicio-por-deposicion-quimica-en-fase-vapor-asistida-por-plasma-pecvd-influencia-de-los-gases-precursores\/","title":{"rendered":"Deposicion de nitruro de silicio por deposicion quimica en fase vapor asistida por plasma (pecvd). influencia de los gases precursores."},"content":{"rendered":"<h2>Tesis doctoral de <strong> Olga Sanchez Garrido <\/strong><\/h2>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Deposicion de nitruro de silicio por deposicion quimica en fase vapor asistida por plasma (pecvd). influencia de los gases precursores.<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Deposicion de nitruro de silicio por deposicion quimica en fase vapor asistida por plasma (pecvd). influencia de los gases precursores. <\/li>\n<li><strong>Autor:<\/strong>\u00a0 Olga Sanchez Garrido <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Aut\u00f3noma de Madrid<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 01\/01\/1990<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li> <\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal: Arturo Baro Vidal <\/li>\n<li>German Gonzalez Diaz (vocal)<\/li>\n<li>Carlos Serna Pereda (vocal)<\/li>\n<li> Martinez Duart Jos\u00e9 Manuel (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Olga Sanchez Garrido &nbsp; Datos acad\u00e9micos de la tesis doctoral \u00abDeposicion de nitruro de silicio por deposicion [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"footnotes":""},"categories":[5453,14247,199,1008],"tags":[23641,13662,6242,15450,105107],"class_list":["post-152518","post","type-post","status-publish","format-standard","hentry","category-aleaciones","category-autonoma-de-madrid","category-fisica","category-fisica-del-estado-solido","tag-arturo-baro-vidal","tag-carlos-serna-pereda","tag-german-gonzalez-diaz","tag-Martinez-duart-jose-manuel","tag-olga-sanchez-garrido"],"_links":{"self":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/posts\/152518","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/comments?post=152518"}],"version-history":[{"count":0,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/posts\/152518\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/media?parent=152518"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/categories?post=152518"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/tags?post=152518"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}