{"id":154551,"date":"2026-01-12T17:13:01","date_gmt":"2026-01-12T17:13:01","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/capas-delgadas-de-nitruro-de-titanio-obtenidas-mediante-plasma-de-radiofrecuencia\/"},"modified":"2026-01-12T17:13:01","modified_gmt":"2026-01-12T17:13:01","slug":"capas-delgadas-de-nitruro-de-titanio-obtenidas-mediante-plasma-de-radiofrecuencia","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/ingenieria-y-tecnologia-quimicas\/capas-delgadas-de-nitruro-de-titanio-obtenidas-mediante-plasma-de-radiofrecuencia\/","title":{"rendered":"Capas delgadas de nitruro de titanio obtenidas mediante plasma de radiofrecuencia"},"content":{"rendered":"<h2>Tesis doctoral de <strong>  Polo Trasancos M. Carmen <\/strong><\/h2>\n<p>El objetivo de este trabajo ha sido la obtencion de capas delgadas de tin a partir del deposito quimico en fase vapor asistido por plasma rf. Se ha construido en el laboratorio un reactor piloto de pacud que permite la obtencion de capas delgadas de tin a partir de una mezcla gaseosa de n2, h2 y vapor de ticl4. Uno de los resultados mas importantes conseguidos es la obtencion de capas delgadas de tin, de hasta 3 um de espesor con buenas propiedades mecanicas, a un valor de la temperatura inferior a 55 c. La estructura de las capas de tin es de tipo columnar y presentan un grado de cristalinidad elevado, con una fuerte orientacion preferencial en la direccion (200). Las propiedades de las capas delgadas de tin obtenidas mediante pacvd dependen de los parametros tecnologicos. El ritmo de deposito de las capas aumenta al incrementar: la temperatura de deposito, la presion total de los gases reactivos, la potencia de la descarga r.F., La presion parcial de ticl4 o la presion parcial de n2. Se han registrado valores del ritmo de deposito comprendidos entre 0,1 y 3 nm\/s. Las capas de tin obtenidas contienen impurezas de cloro que modifican las propiedades del recubrimiento las capas con un contenido de cloro inferior al 2% en atomos presentan una microdureza superior a 2200 kp\/mm2.<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Capas delgadas de nitruro de titanio obtenidas mediante plasma de radiofrecuencia<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Capas delgadas de nitruro de titanio obtenidas mediante plasma de radiofrecuencia <\/li>\n<li><strong>Autor:<\/strong>\u00a0  Polo Trasancos M. Carmen <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Barcelona<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 01\/01\/1991<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li>Joan Esteve Pujol<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal: Josep Codina Vidal <\/li>\n<li> O\u00f1ate De La Presa Jos\u00e9 Ignacio (vocal)<\/li>\n<li>Jos\u00e9 Manuel Prado Pozuelo (vocal)<\/li>\n<li>Pere Molera Sol? (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Polo Trasancos M. Carmen El objetivo de este trabajo ha sido la obtencion de capas delgadas de [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"footnotes":""},"categories":[951,332,305,1125,5958,1126],"tags":[47102,15664,32,42431,1474,268646],"class_list":["post-154551","post","type-post","status-publish","format-standard","hentry","category-barcelona","category-ciencias-tecnologicas","category-ingenieria-y-tecnologia-quimicas","category-propiedades-de-materiales","category-revestimientos-protectores","category-tecnologia-de-materiales","tag-joan-esteve-pujol","tag-jose-manuel-prado-pozuelo","tag-josep-codina-vidal","tag-onate-de-la-presa-jose-ignacio","tag-pere-molera-sol","tag-polo-trasancos-m-carmen"],"_links":{"self":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/posts\/154551","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/comments?post=154551"}],"version-history":[{"count":0,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/posts\/154551\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/media?parent=154551"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/categories?post=154551"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/tags?post=154551"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}