{"id":17362,"date":"2002-11-06T00:00:00","date_gmt":"2002-11-06T00:00:00","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/modelos-teoricos-de-plasmas-de-argon-y-oxa%c2%adgeno-usados-en-la-deposicion-de-laminas-delgadas\/"},"modified":"2002-11-06T00:00:00","modified_gmt":"2002-11-06T00:00:00","slug":"modelos-teoricos-de-plasmas-de-argon-y-oxa%c2%adgeno-usados-en-la-deposicion-de-laminas-delgadas","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/fisica\/modelos-teoricos-de-plasmas-de-argon-y-oxa%c2%adgeno-usados-en-la-deposicion-de-laminas-delgadas\/","title":{"rendered":"Modelos te\u00f3ricos de plasmas de arg\u00f3n y ox\u00edgeno usados en la deposici\u00f3n de l\u00e1minas delgadas"},"content":{"rendered":"<h2>Tesis doctoral de <strong> Alberto Palmero Acebedo <\/strong><\/h2>\n<p>En esta tesis doctoral se abordan diferentes aspectos te\u00f3ricos de los plasmas utilizados en las t\u00e9cnicas de deposici\u00f3n de l\u00e1minas delgadas asistidas por plasmas (pecvd). Los modelos te\u00f3ricos que se realizan est\u00e1n orientados principalmente a la diagnosis del plasma a partir del conocimiento de datos experimentales, tales como la intensidad de una l\u00ednea de emisi\u00f3n o una poblaci\u00f3n (densidad electr\u00f3nica).  en particular,  * se hace una introducci\u00f3n a los plasmas de onda de superficie que se utilizan en los dispositivos de deposici\u00f3n, comentando sus propiedades generales, as\u00ed como los aspectos m\u00e1s relevantes a tener en cuenta al hacer una descripci\u00f3n te\u00f3rica.  * se discute la validez de un m\u00e9todo de espectroscop\u00eda \u00f3ptica de emisi\u00f3n para obtener la temperatura electr\u00f3nica en un plasma de arg\u00f3n de onda de superficie producto por un surfatr\u00f3n. Este m\u00e9todo est\u00e1 basado en una descripci\u00f3n del plasma como dos flu\u00eddos aislados en equilibrio termodin\u00e1mico local a diferentes temperaturas, y en la introducci\u00f3n de un factor de correcci\u00f3n que tiene en cuenta la ausencia de equilibrio en la radiaci\u00f3n para un regimen de excitaci\u00f3n saturaci\u00f3n balance (esb). Por \u00faltimo se obtienen los valores de la temperatura electr\u00f3nica en diferentes casos de presi\u00f3n.  * se realiza un modelo colisional-radiativo radial de una descarga de arg\u00f3n producida a baja presi\u00f3n, que permite obtener las poblaciones m\u00e1s importantes en la descarga (electrones, iones, poblaci\u00f3n de arg\u00f3n en el estado fundamental y estados excitados), a partir del conocimiento de la presi\u00f3n del gas, geometr\u00eda experimental, y la temperatura del reciento del plasma en su cara externa. Tambi\u00e9n se estudia la importancia del calentamiento de las part\u00edculas pesadas en las propiedades del plasma, y se propone un m\u00e9todo experimental para obtener la temperatura media de la descarga basado en la ley de poiseuille para un flu\u00eddo viscoso en r\u00e9gimen laminar asimismo, s<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Modelos te\u00f3ricos de plasmas de arg\u00f3n y ox\u00edgeno usados en la deposici\u00f3n de l\u00e1minas delgadas<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Modelos te\u00f3ricos de plasmas de arg\u00f3n y ox\u00edgeno usados en la deposici\u00f3n de l\u00e1minas delgadas <\/li>\n<li><strong>Autor:<\/strong>\u00a0 Alberto Palmero Acebedo <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Sevilla<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 11\/06\/2002<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li>Jos\u00e9 Cotrino Bautista<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal: vicente Colomer viadel <\/li>\n<li>agustin Rodriguez gonzalez-elipe (vocal)<\/li>\n<li>Javier Brey \u00e1balo (vocal)<\/li>\n<li>Francisco Yubero Valencia (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Alberto Palmero Acebedo En esta tesis doctoral se abordan diferentes aspectos te\u00f3ricos de los plasmas utilizados en [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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