{"id":22141,"date":"2018-03-09T09:12:11","date_gmt":"2018-03-09T09:12:11","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/design-modelling-fabrication-and-test-of-moems-for-optical-gas-detection\/"},"modified":"2018-03-09T09:12:11","modified_gmt":"2018-03-09T09:12:11","slug":"design-modelling-fabrication-and-test-of-moems-for-optical-gas-detection","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/matematicas\/design-modelling-fabrication-and-test-of-moems-for-optical-gas-detection\/","title":{"rendered":"Design, modelling, fabrication and test of moems for optical gas detection"},"content":{"rendered":"<h2>Tesis doctoral de <strong> Carlos Alberto Calaza Cabanas <\/strong><\/h2>\n<p>Esta tesis presenta los resultados obtenidos en el desarrollo de microsistemas \u00f3pticos dise\u00f1ados para la detecci\u00f3n de gases mediante la absorci\u00f3n selectiva de radiaci\u00f3n infrarroja. El trabajo desarrollado se ha organizado en tres partes:  se ha llevado a cabo una modelizaci\u00f3n de un sistema \u00f3ptico de detecci\u00f3n de gases compuestos por los microsistemas \u00f3pticos prouestos, utilizando modelos anal\u00edticos y num\u00e9ricos del comportamiento de los diferentes componentes. se ha simulado la respuesta \u00f3ptica del sistema a diferentes muestras gaseosas y se ha estimado la capacidad de detecci\u00f3n del sistema mediante la utilizaci\u00f3n de diferentes t\u00e9cnicas de procesado de se\u00f1al.  se han dise\u00f1ado dos microsistemas \u00f3pticos para la detecci\u00f3n de gases, un filtro \u00f3ptico sintonizable y un detector de radiaci\u00f3n infrarroja. Como filtro \u00f3ptico sintonizable se ha utilizado un interfer\u00f3metro fabry-perot, que se ha obtenido mediante una tecnolog\u00eda de micromecanizado superficial. esta tecnolog\u00eda de micromecanizado superficial. Esta tecnolog\u00eda de microfabricaci\u00f3n ha sido adecuada para cumplir los requisitos \u00f3pticos espec\u00edficos de la aplicaci\u00f3n. Una vez establecido el proceso de fabricaci\u00f3n se ha evaluado el comportamiento de diferentes alternativas de dise\u00f1o mediante la simulaci\u00f3n mec\u00e1nica y el\u00e9ctrica de su comportamiento, basada en el m\u00e9todo de los elementos finitos. Se han fabricado filtros con diferentes geometr\u00edas basados en las diferentes alternativas tecnol\u00f3gicas propuestas, y se ha caracterizado de forma satisfactoria su funcionamiento.  el detector de infrarrojo dise\u00f1ado, basado en una tecnolog\u00eda de fabricaci\u00f3n est\u00e1ndar para circuitos electr\u00f3nicos cmos, es una termopila, que utiliza termopares de polisilicio\/aluminio para la detecci\u00f3n del incremento de temperatura que produce la absorci\u00f3n de radiaci\u00f3n infrarroja. Se propone un pre-proceso de fabricaci\u00f3n para generar un elemento absorbedor basado en silicio dopado, y<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Design, modelling, fabrication and test of moems for optical gas detection<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Design, modelling, fabrication and test of moems for optical gas detection <\/li>\n<li><strong>Autor:<\/strong>\u00a0 Carlos Alberto Calaza Cabanas <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Barcelona<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 19\/03\/2003<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li>Mauricio Moreno Sereno<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal: josep Calderer cardona <\/li>\n<li>jean-yves Fourniols (vocal)<\/li>\n<li>enric Cabruja casas (vocal)<\/li>\n<li>eduard Llobet valero (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Carlos Alberto Calaza Cabanas Esta tesis presenta los resultados obtenidos en el desarrollo de microsistemas \u00f3pticos dise\u00f1ados [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"footnotes":""},"categories":[951,1890,332,15891,37728,126,3706],"tags":[66361,47890,66363,66362,30443,30442],"class_list":["post-22141","post","type-post","status-publish","format-standard","hentry","category-barcelona","category-ciencia-de-los-ordenadores","category-ciencias-tecnologicas","category-diseno-de-sistemas-sensores","category-diseno-microelectronico","category-matematicas","category-tecnologia-electronica","tag-carlos-alberto-calaza-cabanas","tag-eduard-llobet-valero","tag-enric-cabruja-casas","tag-jean-yves-fourniols","tag-josep-calderer-cardona","tag-mauricio-moreno-sereno"],"_links":{"self":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/posts\/22141","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/comments?post=22141"}],"version-history":[{"count":0,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/posts\/22141\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/media?parent=22141"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/categories?post=22141"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/tags?post=22141"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}