{"id":22441,"date":"2003-04-04T00:00:00","date_gmt":"2003-04-04T00:00:00","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/caracterizacion-a-escala-nanometrica-de-la-degradacion-y-ruptura-dielectrica-del-sio2-en-dispositivos-mos-mediante-c-afm\/"},"modified":"2003-04-04T00:00:00","modified_gmt":"2003-04-04T00:00:00","slug":"caracterizacion-a-escala-nanometrica-de-la-degradacion-y-ruptura-dielectrica-del-sio2-en-dispositivos-mos-mediante-c-afm","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/caracterizacion-a-escala-nanometrica-de-la-degradacion-y-ruptura-dielectrica-del-sio2-en-dispositivos-mos-mediante-c-afm\/","title":{"rendered":"Caracterizaci\u00f3n a escala nanom\u00e9trica de la degradaci\u00f3n y ruptura diel\u00e9ctrica del sio2 en dispositivos mos mediante c-afm"},"content":{"rendered":"<h2>Tesis doctoral de <strong> Marc Porti Pujal <\/strong><\/h2>\n<p>En esta tesis se ha utilizado la microscop\u00eda de fuerzas at\u00f3micas (afm) con punta conductora (c-afm) con la finalidad de estudiar la ruptura diel\u00e9ctrica (bd) de capas delgadas asociadas a la generaci\u00f3n de defectos) a escala nanom\u00e9rica, pues es la escala en la que estos fen\u00f3menos tienen lugar (se estima que la ruptura se desencadena en \u00e1rea de 10-13 -10-12 cm2).  la elevada resoluci\u00f3n del c-afm (-10nm) permite analizar el evento bd con muchos m\u00e1s detalle que las t\u00e9cnicas de caracterizaci\u00f3n el\u00e9ctrica est\u00e1ndar utilizadas hasta ahora.  en cuanto a la etapa de pre-ruptura, se ha demostrado la capacidad de la t\u00e9cnica utilizada para evaluar los mecanismos f\u00edsicos asociados a la degradaci\u00f3n del \u00f3xido. En particular, se han observado fluctuaciones de corriente y conmutaciones entre estados de conductividad bien definida, que se han asociado a la captura\/emisi\u00f3n de electrones en los defectos generados durante el estr\u00e9s el\u00e9ctrico, y que corresponden al ruido de pre-ruptura que precede al evento bd. Tambi\u00e9n se ha demostrado la capacidad del c-afm de obtener la caracter\u00edstica i-v de dichos spots de pre-ruptura fluctuantes, lo cual permitir\u00e1 analizar con m\u00e1s detalle el origen de la corriente de fugas que limita la fiabilidad de algunos dispositivos electr\u00f3nicos como, por ejemplo, las memorias flash.  tambi\u00e9n se ha analizado la ruptura propiamente dicha (cuando se induce con la punta del c-afm) y el efecto del l\u00edmite de corriente en el evento bd, pues recientemente se ha demostrado que los distintos modos de fallo que aparecen en \u00f3xidos muy delgados (ruptura suave, sbd; ruptura progresiva,, pbd; y corriente de fugas, silc, menos severos que la ruptura fuerte, hbd), pueden no dar lugar al fallo del dispositivo o circuito del cual forman parte.  en particular, se ha analizado la conductividad de post-ruptura, la propagaci\u00f3n del evento bd y el da\u00f1o estructural inducido en el \u00f3xido. Se ha demostrado que cuando el \u00f3xido se<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Caracterizaci\u00f3n a escala nanom\u00e9trica de la degradaci\u00f3n y ruptura diel\u00e9ctrica del sio2 en dispositivos mos mediante c-afm<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Caracterizaci\u00f3n a escala nanom\u00e9trica de la degradaci\u00f3n y ruptura diel\u00e9ctrica del sio2 en dispositivos mos mediante c-afm <\/li>\n<li><strong>Autor:<\/strong>\u00a0 Marc Porti Pujal <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Aut\u00f3noma de barcelona<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 04\/04\/2003<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li> Aymerich Humet Francisco Javier<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal: Francisco Serra mestres <\/li>\n<li>jaume Esteve tint\u00f3 (vocal)<\/li>\n<li> Carceller beltr\u00e1n Juan  enrique (vocal)<\/li>\n<li>francesca Campabadal segura (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Marc Porti Pujal En esta tesis se ha utilizado la microscop\u00eda de fuerzas at\u00f3micas (afm) con punta [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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