{"id":31514,"date":"1997-01-01T00:00:00","date_gmt":"1997-01-01T00:00:00","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/estudio-de-aleaciones-silicio-carbono-depositadas-mediante-tecnicas-asistidas-por-plasma-de-resonancia-ciclotron-de-electrones\/"},"modified":"1997-01-01T00:00:00","modified_gmt":"1997-01-01T00:00:00","slug":"estudio-de-aleaciones-silicio-carbono-depositadas-mediante-tecnicas-asistidas-por-plasma-de-resonancia-ciclotron-de-electrones","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/fisica\/estudio-de-aleaciones-silicio-carbono-depositadas-mediante-tecnicas-asistidas-por-plasma-de-resonancia-ciclotron-de-electrones\/","title":{"rendered":"Estudio de aleaciones silicio-carbono depositadas mediante tecnicas asistidas por plasma de resonancia ciclotron de electrones."},"content":{"rendered":"<h2>Tesis doctoral de <strong> Francisco Javier Gomez Arribas <\/strong><\/h2>\n<p>Se han depositado capas de aleaciones silicio-carbono y silicio-carbono-nitrogeno sobre silicio, por deposicion quimica en fase vapor, asistida por plasma de resonancia ciclotron de electrones (ecr-cvd), a baja temperatura de sustrato.  se han conseguido una completa deshidrogenacion de las capas de a-sic:h empleando tratamientos termicos rapidos a alta temperatura en vacio.  se han optimizado las condiciones de deposicion consiguiendose un crecimiento de capas de sic microcristalino con temperaturas de sustrato inferiores a 500 grados c.  se han conseguido capas de sicxny uniformemente depositadas y que no presentan problemas elasticos de relajacion o compresion. Se ha obtenido una relacion entre las propiedades opticas de las capas depositadas con los parametros de deposicion y mas concretamente se ha enconstrado que son controlables con la variacion de la razon entre los gases precursores.<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Estudio de aleaciones silicio-carbono depositadas mediante tecnicas asistidas por plasma de resonancia ciclotron de electrones.<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Estudio de aleaciones silicio-carbono depositadas mediante tecnicas asistidas por plasma de resonancia ciclotron de electrones. <\/li>\n<li><strong>Autor:<\/strong>\u00a0 Francisco Javier Gomez Arribas <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Aut\u00f3noma de Madrid<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 01\/01\/1997<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li>Juan Piqueras Piqueras<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal:  Martinez Duart Jos\u00e9 Manuel <\/li>\n<li>Juan Jimenez (vocal)<\/li>\n<li>German Gonzalez Diaz (vocal)<\/li>\n<li> Martil De La Plaza Ignacio (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Francisco Javier Gomez Arribas Se han depositado capas de aleaciones silicio-carbono y silicio-carbono-nitrogeno sobre silicio, por deposicion [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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