{"id":3344,"date":"1994-01-01T00:00:00","date_gmt":"1994-01-01T00:00:00","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/1994\/01\/01\/desarrollo-tecnologico-para-la-fabricacion-de-isfets-con-contactos-posteriores\/"},"modified":"1994-01-01T00:00:00","modified_gmt":"1994-01-01T00:00:00","slug":"desarrollo-tecnologico-para-la-fabricacion-de-isfets-con-contactos-posteriores","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/ciencias-tecnologicas\/desarrollo-tecnologico-para-la-fabricacion-de-isfets-con-contactos-posteriores\/","title":{"rendered":"Desarrollo tecnologico para la fabricacion de isfets con contactos posteriores"},"content":{"rendered":"<h2>Tesis doctoral de <strong> Angel Merlos Domingo <\/strong><\/h2>\n<p>El objetivo principal de este trabajo ha sido el desarrollo de un proceso de fabricacion de sensores de ph tipo isfet con contactos posteriores o bsc-isfets con una tecnolog\u00eda compatible con los procesos de sala blanca actuales del cnm. Este proceso debia reunir los siguientes requisitos: simple, alto rendimiento, bajo coste, alta reproducibilidad, buenas prestaciones, y en la medida de la posible compatible cmos. La memoria se ha separado en dos partes. En la primera parte se hace un analisis del funcionamiento del isfet como sensor quimico, asi como sus limitaciones y sus aplicaciones.  tambien se muestra el proceso de fabricacion del isfet de contactos frontales desarrollado en el cnm con una tecnolog\u00eda nmos y sus caracteristicas electricas y quimicas. La segunda parte de la memoria corresponde a los bsc-isfets. Aqui se analizan los aspectos tecnologicos de dichos dispositivos y se discuten diversas concepciones de los mismos. A continuacion se exponen las tecnolog\u00edas (grabado anisotropico de silicio con tmah, la deposicion quimica selectiva de niquel y difusiones de gran profundidad) que ha sido necesario desarrollar para poder fabricar las diferentes concepciones de bsc-isfets. Finalmente se presentan los procesos de fabricacion y la caracterizacion electrica y quimica de los dispositivos bsc-isfet.<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Desarrollo tecnologico para la fabricacion de isfets con contactos posteriores<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Desarrollo tecnologico para la fabricacion de isfets con contactos posteriores <\/li>\n<li><strong>Autor:<\/strong>\u00a0 Angel Merlos Domingo <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Aut\u00f3noma de barcelona<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 01\/01\/1994<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li>Jaume Esteve Tint\u00f3<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal: Jordi Bartroli Molins <\/li>\n<li>Javier Gutierrez Monreal (vocal)<\/li>\n<li>Joan Ramon Morante Lleonart (vocal)<\/li>\n<li>Josep Samitier Marti (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Angel Merlos Domingo El objetivo principal de este trabajo ha sido el desarrollo de un proceso de [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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