{"id":36591,"date":"1998-01-01T00:00:00","date_gmt":"1998-01-01T00:00:00","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/estudio-de-peliculas-aislantes-de-silicio-oxigeno-y-nitrogeno-depositadas-por-plasma-ecr-cvd\/"},"modified":"1998-01-01T00:00:00","modified_gmt":"1998-01-01T00:00:00","slug":"estudio-de-peliculas-aislantes-de-silicio-oxigeno-y-nitrogeno-depositadas-por-plasma-ecr-cvd","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/fisica\/estudio-de-peliculas-aislantes-de-silicio-oxigeno-y-nitrogeno-depositadas-por-plasma-ecr-cvd\/","title":{"rendered":"Estudio de peliculas aislantes de silicio, oxigeno y nitrogeno depositadas por plasma ecr-cvd."},"content":{"rendered":"<h2>Tesis doctoral de <strong>  Hernandez Mu\u00f1oz M. Jes\u00fas <\/strong><\/h2>\n<p>Estudio de las propiedades opticas y electricas de peliculas de oxido, nitruro y oxinitruros depositadas sobre silicio mediante deposito en fase vapor asistido por plasma de resonancia ciclotron de electrones. Entre las propiedades estudiadas figuran la velocidad de deposito, el indice de refraccion, la composicion y la densidad de carga, evaluadas mediante elipsometria espectroscopica, espectroscopia ir, tecnicas electricas capacitativas y conductivas.<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Estudio de peliculas aislantes de silicio, oxigeno y nitrogeno depositadas por plasma ecr-cvd.<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Estudio de peliculas aislantes de silicio, oxigeno y nitrogeno depositadas por plasma ecr-cvd. <\/li>\n<li><strong>Autor:<\/strong>\u00a0  Hernandez Mu\u00f1oz M. Jes\u00fas <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Aut\u00f3noma de Madrid<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 01\/01\/1998<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li>Javier Garrido Salas<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal:  Bailon Vega Luis Alberto <\/li>\n<li>Juan Piqueras Piqueras (vocal)<\/li>\n<li>Tomas Rodriguez Rodriguez (vocal)<\/li>\n<li> Martil De La Plaza Ignacio (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Hernandez Mu\u00f1oz M. Jes\u00fas Estudio de las propiedades opticas y electricas de peliculas de oxido, nitruro y [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"footnotes":""},"categories":[10426,199,1008,1605],"tags":[23821,96748,96749,14568,86748,20339],"class_list":["post-36591","post","type-post","status-publish","format-standard","hentry","category-dielectricos","category-fisica","category-fisica-del-estado-solido","category-propiedades-opticas-de-los-solidos","tag-bailon-vega-luis-alberto","tag-hernandez-munoz-m-jesus","tag-javier-garrido-salas","tag-juan-piqueras-piqueras","tag-martil-de-la-plaza-ignacio","tag-tomas-rodriguez-rodriguez"],"_links":{"self":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/posts\/36591","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/comments?post=36591"}],"version-history":[{"count":0,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/posts\/36591\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/media?parent=36591"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/categories?post=36591"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/tags?post=36591"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}