{"id":37444,"date":"1998-01-01T00:00:00","date_gmt":"1998-01-01T00:00:00","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/micromecanizado-de-diafragmas-delgados-de-silicio-con-parada-electroquimica-aplicacion-a-sensores-de-baja-presion-de-grado-biomedico\/"},"modified":"1998-01-01T00:00:00","modified_gmt":"1998-01-01T00:00:00","slug":"micromecanizado-de-diafragmas-delgados-de-silicio-con-parada-electroquimica-aplicacion-a-sensores-de-baja-presion-de-grado-biomedico","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/ingenieria-y-tecnologia-quimicas\/micromecanizado-de-diafragmas-delgados-de-silicio-con-parada-electroquimica-aplicacion-a-sensores-de-baja-presion-de-grado-biomedico\/","title":{"rendered":"Micromecanizado de diafragmas delgados de silicio con parada electroquimica. aplicacion a sensores de baja presion de grado biomedico."},"content":{"rendered":"<h2>Tesis doctoral de <strong> Jorge Garcia Elizalde <\/strong><\/h2>\n<p>En los \u00faltimos a\u00f1os se ha dado una importante evoluci\u00f3n en el campo de los sensores con su tendencia a la miniaturizaci\u00f3n y disminuci\u00f3n de costos. La medida de bajas presiones requiere el uso de diafragmas de espesor delgado obtenidos mediante micromecanizado con parada electroqu\u00edmica del ataque al silicio. El objetivo fundamental se centra en la caracterizaci\u00f3n electroqu\u00edmica del silicio, realizando un estudio sistem\u00e1tico de la influencia de la temperatura y concentraci\u00f3n del atacante (koh) en las variables electroqu\u00edmicas del proceso. El conocimiento de las leyes y la fenomenolog\u00eda que gobiernan el proceso, ha permitido obtener diafragmas delgados con difusi\u00f3n de piezorresistencias en puente de wheatstone. La realizaci\u00f3n de los procesos, ha exigido el dise\u00f1o y la construcci\u00f3n de un sistema autom\u00e1tico de control y medida, as\u00ed como el banco de ensayos electroqu\u00edmicos. Los resultados obtenidos han validado el proceso de fabricaci\u00f3n del microsensor de presi\u00f3n arterial.<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Micromecanizado de diafragmas delgados de silicio con parada electroquimica. aplicacion a sensores de baja presion de grado biomedico.<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Micromecanizado de diafragmas delgados de silicio con parada electroquimica. aplicacion a sensores de baja presion de grado biomedico. <\/li>\n<li><strong>Autor:<\/strong>\u00a0 Jorge Garcia Elizalde <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Navarra<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 01\/01\/1998<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li>Javier Gracia Gaudo<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal: Manuel Fuentes Perez <\/li>\n<li>Santiago Alvarez Perez (vocal)<\/li>\n<li>Luis Casta\u00f1er Mu\u00f1oz (vocal)<\/li>\n<li> Sanchez Rodriguez Juan  Jos\u00e9 (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Jorge Garcia Elizalde En los \u00faltimos a\u00f1os se ha dado una importante evoluci\u00f3n en el campo de [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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