{"id":39184,"date":"1999-01-01T00:00:00","date_gmt":"1999-01-01T00:00:00","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/ion-beam-synthesis-of-silicon-carbon-structures-and-related-materials\/"},"modified":"1999-01-01T00:00:00","modified_gmt":"1999-01-01T00:00:00","slug":"ion-beam-synthesis-of-silicon-carbon-structures-and-related-materials","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/fisica\/ion-beam-synthesis-of-silicon-carbon-structures-and-related-materials\/","title":{"rendered":"Ion beam synthesis of silicon-carbon structures and related materials."},"content":{"rendered":"<h2>Tesis doctoral de <strong> Lorenzo Calvo Barrio <\/strong><\/h2>\n<p>El objetivo principal de este trabajo es el estudio de la s\u00edntesis de sic por implantaci\u00f3n i\u00f3nica de c en substratos de si y estructuras sige\/si. Para ello se desarrolla una completa caracterizaci\u00f3n estructural y f\u00edsico-qu\u00edmica de los distintos procesos, a la vez que se aborda la obtenci\u00f3n de un material utilizable como base para la realizaci\u00f3n de dispositivos micromec\u00e1nicos simples. El estudio se ha estructurado en tres partes. la primera est\u00e1 dedicada a la s\u00edntesis y recristalizaci\u00f3n de capas de sic amorfo, para lo que previamente se ha caracterizado el comportamiento de 6h-sic comercial frente a procesos de implantaci\u00f3n, y despues se ha estudiado en detalle tanto la disposici\u00f3n de los enlaces qu\u00edmicos existentes en funci\u00f3n del contenido de c introducido, como la recristalizaci\u00f3n t\u00e9rmica y por ibiec (cristalizaci\u00f3n epitaxial inducida por haces i\u00f3nicos).  en la segunda parte se ha tratado la s\u00edntesis directa de sic cristalino, realizando los procesos de implantaci\u00f3n a 500 grados c con el fin de evitar la amortizaci\u00f3n del substrato. de esta forma se ha sintentizado unacapa continua y estequiom\u00e9tricade sic enterrada en el substrato de si que ha permitido la fabricaci\u00f3n de estructuras de test micromec\u00e1nicas, como membranas y puentes. la realizaci\u00f3n de este tipo de estructuras, a partir de las capas sintetizadas por implantaci\u00f3n i\u00f3nica, constituye uno de los principales objetivos alcanzados en este trabajo, demostrando la viabilidad de los procesos de micromecanizado de las capas. Por \u00faltimo, la tercera parte del trabajo est\u00e1 dedicada al estudio de los procesos de implantaci\u00f3n en capas de sige, para investigar la dependencia de las fases sintetizadas en el proceso de implantaci\u00f3n con los par\u00e1metros del substrato como el estr\u00e9s y la composici\u00f3n qu\u00edmica y la constante de red.<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Ion beam synthesis of silicon-carbon structures and related materials.<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Ion beam synthesis of silicon-carbon structures and related materials. <\/li>\n<li><strong>Autor:<\/strong>\u00a0 Lorenzo Calvo Barrio <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Barcelona<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 01\/01\/1999<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li>Alejandro P\u00e9rez Rodr\u00edguez<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal: joan ramon Morante lleonart <\/li>\n<li>enrique Calleja pardo (vocal)<\/li>\n<li>Juan Jimenez lopez (vocal)<\/li>\n<li>wolfgang Skorupa (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Lorenzo Calvo Barrio El objetivo principal de este trabajo es el estudio de la s\u00edntesis de sic [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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