{"id":41508,"date":"1999-01-01T00:00:00","date_gmt":"1999-01-01T00:00:00","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/sioxny-crecidos-por-sputtering-reactivo\/"},"modified":"1999-01-01T00:00:00","modified_gmt":"1999-01-01T00:00:00","slug":"sioxny-crecidos-por-sputtering-reactivo","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/fisica\/sioxny-crecidos-por-sputtering-reactivo\/","title":{"rendered":"Sioxny crecidos por sputtering reactivo."},"content":{"rendered":"<h2>Tesis doctoral de <strong> Araceli Gutierrez Llorente <\/strong><\/h2>\n<p>L\u00e1minas delgadas de oxinitruros de silicio (sioxny) se han crecido por sputtering reactivo a partir de diferentes blancos (si, sio2, si3n4) y combinaciones de gases (ar, n2, o2). El objetivo final de estas l\u00e1minas es el dise\u00f1o de recubrimientos \u00f3pticos reflectantes que puedan ser utilizados como espejos en l\u00e1seres de alta potencia siempre que dichos filtros sean transparentes en el rango elegido. De esta forma, en el dispositivo \u00f3ptico en el que se integren no existir\u00e1n p\u00e9rdidas por absorci\u00f3n.  mediante espectrometr\u00eda por retrodispersi\u00f3n de iones (rbs) y an\u00e1lisis de reacciones nucleares (nra) se han determinado la estequiometr\u00eda de las pel\u00edculas, observando que el rango  de n(n\/+o) puede variarase entre los extremos correspondientes al \u00f3xido de silicio (sio2) y al nitruro de silicio (si3n4) a partir del control de las variables de deposici\u00f3n. Mediante espectrocop\u00eda en el ir por transformada de fourier (ftir) se ha analizado la estructura qu\u00edmica de las l\u00e1minas, concluyendo que \u00e9sta no corresponde a una separaci\u00f3n de fases sio2\/si3n4 y que no est\u00e1 unicamente determinada por la estequiometr\u00eda de la pel\u00edcula. En efecto, la combinaci\u00f3n blanco\/plasma utilizada en el crecimiento influye en su microestructura. la rugosidad superficial de las l\u00e1minas se ha analizado medinate microscop\u00eda de fuerzas at\u00f3micas (afm). Dicha rugosidad es suficientemente baja como para que las l\u00e1minas quedan emplearse como recubrimientos \u00f3pticos asegurando bajas p\u00e9rdidas por dispersi\u00f3n. las propiedades \u00f3pticas (\u00edndice de refracci\u00f3n: n; coeficiente de extinci\u00f3n: k) en el rango visible se han determinado a partir de medidas de reflectancia (r) y transmitancia (t). En las l\u00e1minas de sioxny crecidas a partir de un blanco de si el \u00edndice de refracci\u00f3n (n) puede variarse entre los correspondientes a nsio2 y nsi3n4 adem\u00e1s de ser transparente en el rango visible. Por ello, estas pel\u00edculas se han utilizado para crecer un filtro re<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Sioxny crecidos por sputtering reactivo.<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Sioxny crecidos por sputtering reactivo. <\/li>\n<li><strong>Autor:<\/strong>\u00a0 Araceli Gutierrez Llorente <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Aut\u00f3noma de Madrid<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 01\/01\/1999<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li> Martinez Duart Jos\u00e9 Manuel<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal: Juan Piqueras piqueras <\/li>\n<li>Rafael Bueno barbeyto (vocal)<\/li>\n<li>german Gonzalez diaz (vocal)<\/li>\n<li>olga Sanchez garrido (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Araceli Gutierrez Llorente L\u00e1minas delgadas de oxinitruros de silicio (sioxny) se han crecido por sputtering reactivo a [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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