{"id":42275,"date":"1999-01-01T00:00:00","date_gmt":"1999-01-01T00:00:00","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/desarrollo-de-un-microsensor-de-presion-piezorresistivo-para-la-operacion-en-el-rango-de-presiones-medias-y-altas-temperaturas\/"},"modified":"1999-01-01T00:00:00","modified_gmt":"1999-01-01T00:00:00","slug":"desarrollo-de-un-microsensor-de-presion-piezorresistivo-para-la-operacion-en-el-rango-de-presiones-medias-y-altas-temperaturas","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/fisica\/desarrollo-de-un-microsensor-de-presion-piezorresistivo-para-la-operacion-en-el-rango-de-presiones-medias-y-altas-temperaturas\/","title":{"rendered":"Desarrollo de un microsensor de presion piezorresistivo para la operacion en el rango de presiones medias y altas temperaturas."},"content":{"rendered":"<h2>Tesis doctoral de <strong> Isabel Ayerdi Olaizola <\/strong><\/h2>\n<p>El campo de la sens\u00f3rica est\u00e1 experimentando actualmente un espectacular desarrollo consecuencia de la fuerte competitividad industrial, los importantes avances tecnol\u00f3gicos de los \u00faltimos a\u00f1os y la cont\u00ednua aparici\u00f3n de nuevos mercados y aplicaciones.  en este contexto, aun cuando los microsensores de silicio est\u00e1n jugando un papel fundamental, el procesamiento convencional del silicio limita la operaci\u00f3n de circuitos electr\u00f3nicos y dispositivos a temperaturas inferiores a los 125 grados c.  esta tesis recoge el trabajo realizado con objeto de obtener un microsensor de presi\u00f3n para altas temperaturas.  la microestructura desarrollada opera correctamente en un rango de temperaturas de 25 a 270 grados c y presiones de 0 a 60 bares, destacando las bajas derivas t\u00e9rmicas, los altos valores de linealidad y la baja hist\u00e9resis que ofrece su respuesta.  la soluci\u00f3n adoptada corresponde al tipo denominado sensors on silicon. Las piezorresistencias en puente de wheatstone, son crecidas sobre el sustrato de silicio t\u00e9rmicamente oxidado, evitando las t\u00e9cnicas de difusi\u00f3n e implantaci\u00f3n i\u00f3nica y la formaci\u00f3n de uniones pn que ellas conllevan.  el silicio monocristalino empleado como sustrato del microsensor permite, mediante t\u00e9cnicas de micromecanizado, la obtenci\u00f3n de diafragmas deformables por la presi\u00f3n de espesor altamente controlable. La tecnolog\u00eda de pel\u00edcula delgada permite el crecimiento de nitruros derivados del t\u00e1ntalo como material piezorresistivo de baja sensibilidad t\u00e9rmica y elevada estabilidad operativa.<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Desarrollo de un microsensor de presion piezorresistivo para la operacion en el rango de presiones medias y altas temperaturas.<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Desarrollo de un microsensor de presion piezorresistivo para la operacion en el rango de presiones medias y altas temperaturas. <\/li>\n<li><strong>Autor:<\/strong>\u00a0 Isabel Ayerdi Olaizola <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Navarra<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 01\/01\/1999<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li>Javier Gracia Gaudo<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal: manuel Fuentes perez <\/li>\n<li>jaume Esteve tint\u00f3 (vocal)<\/li>\n<li>Santiago Alvarez perez (vocal)<\/li>\n<li>Fernando Arizti urquijo (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Isabel Ayerdi Olaizola El campo de la sens\u00f3rica est\u00e1 experimentando actualmente un espectacular desarrollo consecuencia de la [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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