{"id":53265,"date":"2018-03-09T22:40:57","date_gmt":"2018-03-09T22:40:57","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/caracterizacion-de-dielectricos-de-alta-permitividad-crecidos-mediante-ald-hprs-y-ecr-cvd\/"},"modified":"2018-03-09T22:40:57","modified_gmt":"2018-03-09T22:40:57","slug":"caracterizacion-de-dielectricos-de-alta-permitividad-crecidos-mediante-ald-hprs-y-ecr-cvd","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/fisica\/caracterizacion-de-dielectricos-de-alta-permitividad-crecidos-mediante-ald-hprs-y-ecr-cvd\/","title":{"rendered":"Caracterizaci\u00f3n de diel\u00e9ctricos de alta permitividad crecidos mediante ald, hprs y ecr-cvd"},"content":{"rendered":"<h2>Tesis doctoral de <strong> H\u00e9ctor Garc\u00eda Garc\u00eda <\/strong><\/h2>\n<p>Desde hace m\u00e1s de 30 a\u00f1os existe la tendencia a la miniaturizaci\u00f3n de los dispositivos electr\u00f3nicos, lo que se conoce como ley de moore. Sin embargo, se est\u00e1n alcanzando tama\u00f1os de dispositivos tan peque\u00f1os, que parece existir un l\u00edmite f\u00edsico que impide el cumplimiento de esta ley a no muy largo plazo. Un problema, se debe a que el espesor del aislante utilizado para aislar la puerta de transistores mosfet es tan delgado que se producen demasiadas p\u00e9rdidas debido al efecto t\u00fanel. Una soluci\u00f3n consiste en la sustituci\u00f3n del aislante utilizado, sio2, por otro de mayor constante diel\u00e9ctrica.  el objetivo de esta tesis fue el estudio de diversos materiales aislantes para su utilizaci\u00f3n como nuevos aislantes de puerta. Estos materiales han sido nitruros de silicio, \u00f3xidos de aluminio, \u00f3xidos de hafnio, \u00f3xidos de titanio, silicatos de hafnio y otras mezclas y compuestos nanolaminados. para crecer estos materiales, se han utilizado diversas t\u00e9cnicas de crecimiento: ald, hprs y ecr-cvd. Las propiedades se estudiaron a partir de t\u00e9cnicas de caracterizaci\u00f3n el\u00e9ctricas y no el\u00e9ctricas.<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Caracterizaci\u00f3n de diel\u00e9ctricos de alta permitividad crecidos mediante ald, hprs y ecr-cvd<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Caracterizaci\u00f3n de diel\u00e9ctricos de alta permitividad crecidos mediante ald, hprs y ecr-cvd <\/li>\n<li><strong>Autor:<\/strong>\u00a0 H\u00e9ctor Garc\u00eda Garc\u00eda <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Valladolid<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 20\/06\/2006<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li>Salvador Due\u00f1as Carazo<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal:  Bail\u00f3n vega Luis alberto <\/li>\n<li>Juan Piqueras piqueras (vocal)<\/li>\n<li>germ\u00e1n Gonz\u00e1lez-d\u00edaz (vocal)<\/li>\n<li>tom\u00e1s Gonz\u00e1lez s\u00e1nchez (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de H\u00e9ctor Garc\u00eda Garc\u00eda Desde hace m\u00e1s de 30 a\u00f1os existe la tendencia a la miniaturizaci\u00f3n de los [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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