{"id":59619,"date":"2007-03-07T00:00:00","date_gmt":"2007-03-07T00:00:00","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/membranas-metalicas-suspendidas-para-el-desarrollo-de-microsistemas-electromecanicos-para-radiofrecuencia-rfmems\/"},"modified":"2007-03-07T00:00:00","modified_gmt":"2007-03-07T00:00:00","slug":"membranas-metalicas-suspendidas-para-el-desarrollo-de-microsistemas-electromecanicos-para-radiofrecuencia-rfmems","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/dispositivos-de-microondas\/membranas-metalicas-suspendidas-para-el-desarrollo-de-microsistemas-electromecanicos-para-radiofrecuencia-rfmems\/","title":{"rendered":"Membranas met\u00e1licas suspendidas para el desarrollo de microsistemas electromec\u00e1nicos para radiofrecuencia (rfmems)"},"content":{"rendered":"<h2>Tesis doctoral de <strong> Jon Ander Etxeberria Intxausti <\/strong><\/h2>\n<p>Membranas met\u00e1licas suspendidas para el desarrollo de microsistemas electromec\u00e1nicos para radiofrecuencia (rfmems) el mundo tecnol\u00f3gico e industrial actual solicita productos con un gran valor a\u00f1adido en prestaciones y fiabilidad. La continua mejora de estas prestaciones obliga a introducir nuevos dise\u00f1os y materiales en la fabricaci\u00f3n de estos dispositivos. Dentro de este nuevo escenario, el trabajo que ahora se presenta pretende definir un proceso tecnol\u00f3gico para el desarrollo de membranas met\u00e1licas suspendidas para su empleo  en estructuras capacitivas. Estas  estructuras capacitivas han permitido desarrollar microcondensadores variables  de membrana de silicio y de membrana de aluminio. Los dispositivos desarrollados presentan buenas cualidades funcionales, tales como un elevado factor de calidad  q, amplio rango frecuencial, posibilidad  de operaci\u00f3n con grandes niveles de tensi\u00f3n dc y se\u00f1ales rf, y desacoplo entre la tensi\u00f3n dc y la se\u00f1a rf. at present, technological and industrial world demand new products with improved performances. The continuous improvements of these features need new materials and designs for the development of the devices. This wok defines a technological fabrication process to develop suspended metallic membranes for its use in capacitive structures. These capacitive structures have let us to fabricate silicon and aluminium membrane based variable capacitors. Developed devices present very interesting performances, as for instance, high quality factor and wide frequency range.<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Membranas met\u00e1licas suspendidas para el desarrollo de microsistemas electromec\u00e1nicos para radiofrecuencia (rfmems)<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Membranas met\u00e1licas suspendidas para el desarrollo de microsistemas electromec\u00e1nicos para radiofrecuencia (rfmems) <\/li>\n<li><strong>Autor:<\/strong>\u00a0 Jon Ander Etxeberria Intxausti <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Navarra<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 03\/07\/2007<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li>Javier Gracia Gaudo<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal: javier Gil sevillano <\/li>\n<li>angel Rodriguez Martinez (vocal)<\/li>\n<li>xavier Correig blanchar (vocal)<\/li>\n<li>Jos\u00e9 Millan gomez (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Jon Ander Etxeberria Intxausti Membranas met\u00e1licas suspendidas para el desarrollo de microsistemas electromec\u00e1nicos para radiofrecuencia (rfmems) el [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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