{"id":78291,"date":"2018-03-09T23:23:54","date_gmt":"2018-03-09T23:23:54","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/pela%c2%adculas-delgadas-de-nitruro-de-aluminio-depositadas-por-pulverizacion-y-su-aplicacion-a-dispositivos-de-ondas-acusticas\/"},"modified":"2018-03-09T23:23:54","modified_gmt":"2018-03-09T23:23:54","slug":"pela%c2%adculas-delgadas-de-nitruro-de-aluminio-depositadas-por-pulverizacion-y-su-aplicacion-a-dispositivos-de-ondas-acusticas","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/fisica\/pela%c2%adculas-delgadas-de-nitruro-de-aluminio-depositadas-por-pulverizacion-y-su-aplicacion-a-dispositivos-de-ondas-acusticas\/","title":{"rendered":"Pel\u00edculas delgadas de nitruro de aluminio depositadas por pulverizaci\u00f3n y su aplicaci\u00f3n a dispositivos de ondas ac\u00fasticas"},"content":{"rendered":"<h2>Tesis doctoral de <strong> Luc\u00eda Vergara Herrero <\/strong><\/h2>\n<p>Resumenesta tesis trata de la adquisici\u00f3n de la tecnolog\u00eda de fabricaci\u00f3n de capas delgadas policristalinas de nitruro de aluminio (aln) con propiedades piezoel\u00e9ctricas adecuadas para la fabricaci\u00f3n de dispositivos de ondas ac\u00fasticas de superficie (saw) con aplicaciones en electr\u00f3nica de radiofrecuencia. la t\u00e9cnica que se ha empleado para el dep\u00f3sito de las pel\u00edculas de nitruro de aluminio es la pulverizaci\u00f3n reactiva de radiofrecuencia; se trata de una t\u00e9cnica muy vers\u00e1til y de uso com\u00fan en tecnolog\u00eda electr\u00f3nica que permite obtener l\u00e1minas de buena calidad a temperaturas de dep\u00f3sito bajas. El material depositado se ha caracterizado mediante la determinaci\u00f3n de su composici\u00f3n, su estructura cristalina y sus propiedades piezoel\u00e9ctricas. Se han relacionado estas caracter\u00edsticas con los mecanismos del proceso de dep\u00f3sito, analiz\u00e1ndolas en funci\u00f3n de las variables accesibles de dicho proceso. Se han establecido, adem\u00e1s, las condiciones \u00f3ptimas para el dep\u00f3sito de l\u00e1minas de nitruro de aluminio sobre sustratos de silicio y silicio oxidado, compatibles con las tecnolog\u00edas habituales de fabricaci\u00f3n de circuitos integrados. Se ha comprobado la validez del material crecido dise\u00f1ando y fabricando dispositivos de ondas ac\u00fasticas de superficie basados en \u00e9l, en concreto filtros paso banda que trabajan a diversas frecuencias. Estos filtros se han caracterizado y modelado con objeto de optimizar su respuesta.  abstract  this thesis deals with the acquisition of the technology of fabrication of polycrystalline aluminium nitride (aln) thin films with piezoelectric properties suitable for the fabrication of surface acoustic wave (saw) devices with application in radiofrequency electronics. The aluminium nitride films have been deposited by radiofrequency reactive sputtering; it is a very versatile technique commonly used in electronic technology that allows to obtain good-quality films at low deposition temperatures. The<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Pel\u00edculas delgadas de nitruro de aluminio depositadas por pulverizaci\u00f3n y su aplicaci\u00f3n a dispositivos de ondas ac\u00fasticas<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Pel\u00edculas delgadas de nitruro de aluminio depositadas por pulverizaci\u00f3n y su aplicaci\u00f3n a dispositivos de ondas ac\u00fasticas <\/li>\n<li><strong>Autor:<\/strong>\u00a0 Luc\u00eda Vergara Herrero <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Polit\u00e9cnica de Madrid<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 18\/01\/2006<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li>Enrique Iborra Grau<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal: Jes\u00fas Sangrador garcia <\/li>\n<li> Horiillo g\u00ed\u00bcemes Mar\u00eda del carmen (vocal)<\/li>\n<li>Fernando Calle g\u00f3mez (vocal)<\/li>\n<li>olga S\u00e1nchez garrido (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Luc\u00eda Vergara Herrero Resumenesta tesis trata de la adquisici\u00f3n de la tecnolog\u00eda de fabricaci\u00f3n de capas delgadas [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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