{"id":86329,"date":"2018-03-10T00:10:54","date_gmt":"2018-03-10T00:10:54","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/analisis-de-oxidos-de-silicio-y-estructuras-multicapa-para-aplicaciones-microelectronicas\/"},"modified":"2018-03-10T00:10:54","modified_gmt":"2018-03-10T00:10:54","slug":"analisis-de-oxidos-de-silicio-y-estructuras-multicapa-para-aplicaciones-microelectronicas","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/fisica\/analisis-de-oxidos-de-silicio-y-estructuras-multicapa-para-aplicaciones-microelectronicas\/","title":{"rendered":"An\u00e1lisis de oxidos de silicio y estructuras multicapa para aplicaciones microelectronicas"},"content":{"rendered":"<h2>Tesis doctoral de <strong> Jos\u00e9 Antonio Moreno Pastor <\/strong><\/h2>\n<p>El trabajo se centra en el estudio composicional y estructural del \u00f3xido de silicio utilizando espectroscop\u00eda infrarroja ir y que fotoelectrones de rayos x (xps).  se analizan las repercusiones de la geometr\u00eda de capa habitual en microelectr\u00f3nica sobre los espectros de infrarrojo y se ofrecen calibraciones a los valores de los par\u00e1metros de las bandas de absorci\u00f3n al variar al espesor de las capas y la intensidad de las bandas. Se proponen y validan procedimientos para la obtenci\u00f3n de la funci\u00f3n diel\u00e9ctrica. Asimismo, se calcula un factor de calibraci\u00f3n para obtener concentraciones de enlaces a partir de \u00e1reas de bandas.  una amplia variedad de \u00f3xidos de silicio han sido depositados mediante apcvd, pecvd y lpcvd y analizados con los procedimientos de c\u00e1lculo desarrollados.  se desarrolla un modelo termodin\u00e1mico que explica las probabilidades de enlace de las especies que componen el \u00f3xido, las cuales se han determinado experimentalmente mediante el an\u00e1lisis composicional.  de la aplicaci\u00f3n del modelo a los resultados experimentales se desprende un criterio de estabilidad termodin\u00e1mica para los \u00f3xidos.  la distribuci\u00f3n del ox\u00edgeno en los \u00f3xidos ha sido determinada mediante xps y su evoluci\u00f3n t\u00e9rmica ha sido explicada en t\u00e9rminos de un modelo termodin\u00e1mico basado en el intercambio de \u00e1tomos de ox\u00edgeno entre los tetraedros centrados en \u00e1tomos de silicio que componen el material.  los procedimientos de an\u00e1lisis desarrollados han sido incorporados a una herramienta inform\u00e1tica llamada capas, implementada en lenguaje c.<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>An\u00e1lisis de oxidos de silicio y estructuras multicapa para aplicaciones microelectronicas<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 An\u00e1lisis de oxidos de silicio y estructuras multicapa para aplicaciones microelectronicas <\/li>\n<li><strong>Autor:<\/strong>\u00a0 Jos\u00e9 Antonio Moreno Pastor <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Barcelona<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 14\/09\/2000<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li>Josep Samitier Marti<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal: joan ramon Morante lleonart <\/li>\n<li>salvador Due\u00f1as carazo (vocal)<\/li>\n<li>josep Monteserrat marti (vocal)<\/li>\n<li>Carlos Dominguez horna (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Jos\u00e9 Antonio Moreno Pastor El trabajo se centra en el estudio composicional y estructural del \u00f3xido de [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"footnotes":""},"categories":[951,8991,2675,199,6064],"tags":[30445,14047,181278,181279,14048,95494],"class_list":["post-86329","post","type-post","status-publish","format-standard","hentry","category-barcelona","category-circuitos-integrados","category-electronica","category-fisica","category-interaccion-de-la-radiacion-con-los-solidos","tag-carlos-dominguez-horna","tag-joan-ramon-morante-lleonart","tag-jose-antonio-moreno-pastor","tag-josep-monteserrat-marti","tag-josep-samitier-marti","tag-salvador-duenas-carazo"],"_links":{"self":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/posts\/86329","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/comments?post=86329"}],"version-history":[{"count":0,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/posts\/86329\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/media?parent=86329"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/categories?post=86329"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.deberes.net\/tesis\/wp-json\/wp\/v2\/tags?post=86329"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}