{"id":86902,"date":"2000-11-10T00:00:00","date_gmt":"2000-11-10T00:00:00","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/ionizacion-y-excitacion-disociativas-producidas-por-impacto-electronico-sobre-fluorometanos-cf4-chf3-ch2f2-y-ch3-f\/"},"modified":"2000-11-10T00:00:00","modified_gmt":"2000-11-10T00:00:00","slug":"ionizacion-y-excitacion-disociativas-producidas-por-impacto-electronico-sobre-fluorometanos-cf4-chf3-ch2f2-y-ch3-f","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/fisica\/ionizacion-y-excitacion-disociativas-producidas-por-impacto-electronico-sobre-fluorometanos-cf4-chf3-ch2f2-y-ch3-f\/","title":{"rendered":"Ionizaci\u00f3n y excitaci\u00f3n disociativas producidas por impacto electronico sobre fluorometanos (cf4, chf3, ch2f2 y ch3 f)."},"content":{"rendered":"<h2>Tesis doctoral de <strong> Inmaculada Torres Novalbos <\/strong><\/h2>\n<p>El estudio de los procesos colisionales en los que intervienen halometanos es de creciente actividad y constituye un formidable desaf\u00edo en la investigaci\u00f3n tanto t\u00e9orica como experimental ya que la importancia de los plasmas de baja temepratura queda patente en sus m\u00fatliples aplicaciones; alumbrado de alto rendimiento, grabado de semiconductores en procesadores y circuitos integrados en elelctr\u00f3nica, esterilizaci\u00f3n de material m\u00e9dico y alimentos, tratamiento de gases contaminantes y potabilizaci\u00f3n de agua, etc.  el estudio llevado a cabo aporta informaci\u00f3n sobre las caracter\u00edsticas del plasma generado por bombardeo electr\u00f3nico de media y alta energ\u00eda fluorometanos (cf1, chf3, ch2, f2 y ch3f). En una primera parte se centra el estudio en los fragmentos i\u00f3nicos. La t\u00e9cnica empleada, ei-tof-ms, permiten , adem\u00e1s de la determinaci\u00f3n de sei parciales, la obtenci\u00f3n de otros par\u00e1metros relevantes, como las dec de los fragmentos i\u00f3nicos y sus umbrales de aparici\u00f3n, que, junto con c\u00e1lculos termodin\u00e1micos, forman las bases para la identificaci\u00f3n de los caminos de reacci\u00f3n. El estudio sobre la ionizaci\u00f3n de fluorometanos se completa con el c\u00e1lculo te\u00f3rico de secciones eficaces de ionizaci\u00f3n totales para todos los gases utilizando tanto m\u00e9todos ab-inito (deutsch-m\u00ed\u00a4rk, kim-beb y khare-beb) como semi-emp\u00edricos (regla de actvidad modificada y m\u00e9todo de polarizabilidad).  en un segundo apartado se analiza la emisi\u00f3n de los fragmentos excitados, esencialmente \u00e1tomos de fl\u00faor, en la regi\u00f3n espectral de 500-900 nm. Se ha demostrado que las especies activas en el grabado de semiconductores de silicio son \u00e1tamos de hal\u00f3genos exctiados en ciertos niveles. El conocimiento de las energ\u00edas implicadas en los plasmas grabado y el rendimiento de producci\u00f3n de las especies (factores estrechamente relacionados con la secci\u00f3n eficaz de emisi\u00f3n) son cruciales para el modelado de plasmas. El estudio de la dependencia de la secci<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Ionizaci\u00f3n y excitaci\u00f3n disociativas producidas por impacto electronico sobre fluorometanos (cf4, chf3, ch2f2 y ch3 f).<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Ionizaci\u00f3n y excitaci\u00f3n disociativas producidas por impacto electronico sobre fluorometanos (cf4, chf3, ch2f2 y ch3 f). <\/li>\n<li><strong>Autor:<\/strong>\u00a0 Inmaculada Torres Novalbos <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Pa\u00eds vasco\/euskal herriko unibertsitatea<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 11\/10\/2000<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li>Fernando Casta\u00f1o Almendral<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal: Francisco Tom\u00e1s vert <\/li>\n<li>Jaime De andres (vocal)<\/li>\n<li>Manuel Y\u00e1\u00f1ez montero (vocal)<\/li>\n<li>Jos\u00e9 Campos gutierrez (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Inmaculada Torres Novalbos El estudio de los procesos colisionales en los que intervienen halometanos es de creciente [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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