{"id":87053,"date":"2018-03-10T00:11:47","date_gmt":"2018-03-10T00:11:47","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/obtencion-de-capas-finas-de-nitruro-de-boro-hexagonal-y-cubico-por-pulverizacion-catodica-rf-magnetron\/"},"modified":"2018-03-10T00:11:47","modified_gmt":"2018-03-10T00:11:47","slug":"obtencion-de-capas-finas-de-nitruro-de-boro-hexagonal-y-cubico-por-pulverizacion-catodica-rf-magnetron","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/fisica\/obtencion-de-capas-finas-de-nitruro-de-boro-hexagonal-y-cubico-por-pulverizacion-catodica-rf-magnetron\/","title":{"rendered":"Obtenci\u00f3n de capas finas de nitruro de boro hexagonal y c\u00fabico por pulverizaci\u00f3n cat\u00f3dica rf magnetr\u00f3n"},"content":{"rendered":"<h2>Tesis doctoral de <strong> Susana Gimeno Llorens <\/strong><\/h2>\n<p>Mediante pulverizaci\u00f3n cat\u00f3dica rf magnetr\u00f3n se han depositado capas de nitruro de boro hexagonal y c\u00fabico. El dep\u00f3sito de la fase c\u00fabica se consigue en atm\u00f3sferas ricas en arg\u00f3n (&gt;85%ar-&lt;15%n2) y polarizando suficientemente el sustrato (a partir de -60v), ya que es necesario un cierto bombardeo i\u00f3nico sobre la capa, que viene dado por los iones del plasma que son acelerados hacie el sustrato. La polarizaci\u00f3n de \u00e9ste se consigue gracias a un sistema que consiste en sintonizar un fen\u00f3meno de resonancia entre el dispositivo autopolarizador y la capacidad entre el sustrato y el plasma.  el par\u00e1metro m\u00e1s importante en el dep\u00f3sito de la fase c\u00fabica es el momento incidente por \u00e1tomo depositado, que ya incluye en su definici\u00f3n los par\u00e1metros densidad i\u00f3nica y energ\u00eda de los iones. Para este par\u00e1metro, se ha establecido una ventana de valores en los que se obtiene nitruro de boro c\u00fabico sin entrar en zona de resputtering.  se han obtenido cpaas con m\u00e1s de un 905 de fase  c\u00fabica y se han llevado a cabo una serie de experimentos dirigidos a mejorar la estabilidad de las capas. De entre ellos, el recubrimiento de nitruro de boro c\u00fabico con hexagonal, el dep\u00f3stico con un 18% de hidr\u00f3geno en el gas y sobre capas intermedias de 40a de n\u00edquel y silicio dopado con boro han dado lugar a capas m\u00e1s duradera en contacto con la atm\u00f3sfera.<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Obtenci\u00f3n de capas finas de nitruro de boro hexagonal y c\u00fabico por pulverizaci\u00f3n cat\u00f3dica rf magnetr\u00f3n<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Obtenci\u00f3n de capas finas de nitruro de boro hexagonal y c\u00fabico por pulverizaci\u00f3n cat\u00f3dica rf magnetr\u00f3n <\/li>\n<li><strong>Autor:<\/strong>\u00a0 Susana Gimeno Llorens <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Barcelona<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 25\/10\/2000<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li>Arturo Lousa Rodr\u00edguez<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal: josep Mar\u00eda Guilemany casadamon <\/li>\n<li>josep Costa balanzat (vocal)<\/li>\n<li>Jos\u00e9 Luis Morenza gil (vocal)<\/li>\n<li>Jos\u00e9 Mar\u00eda Albella martin (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Susana Gimeno Llorens Mediante pulverizaci\u00f3n cat\u00f3dica rf magnetr\u00f3n se han depositado capas de nitruro de boro hexagonal [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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