{"id":88506,"date":"2018-03-10T00:13:29","date_gmt":"2018-03-10T00:13:29","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/sin-categoria\/analisi-i-correcio-de-les-limitacions-en-la-aplicacio-de-transductors-tipus-isfet\/"},"modified":"2018-03-10T00:13:29","modified_gmt":"2018-03-10T00:13:29","slug":"analisi-i-correcio-de-les-limitacions-en-la-aplicacio-de-transductors-tipus-isfet","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/ciencias-tecnologicas\/analisi-i-correcio-de-les-limitacions-en-la-aplicacio-de-transductors-tipus-isfet\/","title":{"rendered":"Analisi i correcio de les limitacions en la aplicacio de transductors tipus isfet"},"content":{"rendered":"<h2>Tesis doctoral de <strong> Antonio Baldi Coll <\/strong><\/h2>\n<p>Tras una introduccion a la teoria de funcionamiento y fabricacion de los transductores tipo isfet se realiza un analisis de los problemas de fiabilidad mas importantes que sufren estos transductores (isfet con membrana de si3n4 fabricados con una tecnolog\u00eda nmos con puerta de aluminio).  concretamente se identifican tres problemas principales:1. Aparicion de corrientes de fugas, atribuibles a un degradado del encapsulado y que provocan un comportamiento inestable y poco repetitivo. 2. Inestabilidad de la tensi\u00f3n umbral, atribuible a la inyeccion y atrapamiento de carga en los dielectricos producida por pulsos de tension elevada proporcionados accidentalmente por el personal que manipula el transductor. 3. Dispersion de los valores de tension umbral en los dispositivos recien fabricados. Este ultimo problema tambien es atribuible a pulsos de tension elevada asi como a irradiacion de las obleas durante la fabricacion. Las etapas de fabricacion que pueden producir estos pulsos de tension o irradiaciones son principalmente las de gravado en equipos de plasma(gravado tipo rie) y las de deposicion por ca\u00f1on de electrones.  a continuaci\u00f3n se presentan nuevos dise\u00f1os de mascaras y de procesos de fabricaci\u00f3n que intentan solucionar los problemas de fiabilidad antes mencionados. concretamente se expone la implementaci\u00f3n de un ajuste de la tensi\u00f3n umbral con implantaci\u00f3n de fosforo para obtener isfets que trabajen a tensi\u00f3n de puerta alrededor de cero, la integraci\u00f3n de un electrodo de platino para utilizar en un sistema de proteccion contra descargas electrostaticas, la integracion de un transitor mnos con las mimsas caracteristicas electricias que el isfet para aplicaci\u00f3n al circuito de polarizaci\u00f3n a tension de puerta y tension de drenador constantes y el aislamiento de los dispositivos respecto al substrato para evitar las fugas hacia el mismo por dos sistemas diferentes, por union p-n(pozo p en substrato n) y por trincheras en oble<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Analisi i correcio de les limitacions en la aplicacio de transductors tipus isfet<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Analisi i correcio de les limitacions en la aplicacio de transductors tipus isfet <\/li>\n<li><strong>Autor:<\/strong>\u00a0 Antonio Baldi Coll <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Aut\u00f3noma de barcelona<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 19\/01\/2001<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li>Carlos Dominguez Horna<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal: josep Calderer blanchar <\/li>\n<li>xavier Correig blanchar (vocal)<\/li>\n<li>edith Navarro anton (vocal)<\/li>\n<li>teofilo Diaz-caballero arnau (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Antonio Baldi Coll Tras una introduccion a la teoria de funcionamiento y fabricacion de los transductores tipo [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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