{"id":9936,"date":"1996-01-01T00:00:00","date_gmt":"1996-01-01T00:00:00","guid":{"rendered":"https:\/\/www.deberes.net\/tesis\/1996\/01\/01\/caracterizacion-por-espectroscopia-raman-de-polisilicio-para-aplicacion-en-micromecanica\/"},"modified":"1996-01-01T00:00:00","modified_gmt":"1996-01-01T00:00:00","slug":"caracterizacion-por-espectroscopia-raman-de-polisilicio-para-aplicacion-en-micromecanica","status":"publish","type":"post","link":"https:\/\/www.deberes.net\/tesis\/fisica\/caracterizacion-por-espectroscopia-raman-de-polisilicio-para-aplicacion-en-micromecanica\/","title":{"rendered":"Caracterizacion por espectroscopia raman de polisilicio para aplicacion en micromecanica."},"content":{"rendered":"<h2>Tesis doctoral de <strong>  Ben Rakkad Mohamed Said <\/strong><\/h2>\n<p>El silicio policristalino, material basico en el desarrollo de mems (micro-electro-mechanical-systems), ha sido estudiado desde punto de vista estructural y mecanico mediante espectroscopia raman, utilizando simulaciones basadas en el modelo de correlacion espacial y presencia de esfuerzos. Se ha utilizado tambien otras tecnicas complementarias (medidas de curvatura, xrd, tem, afm) con el fin de corroborar los resultados de espectroscopia raman.  segun la morfolog\u00eda de las capas de polisilicio, basicamente el tama\u00f1o de grano y los defectos en el material, se presentan diferentes situaciones que se han modelizado:  a) polisilicio con esfuerzo uniforme b) polisilicio con esfuerzo mecanico uniforme y con confinamiento espacial c) polisilicio con distribucion del esfuerzo y confinamiento espacial.  el conocimiento adquirido nos permite predecir el comportamiento de estructuras micromecanicas construidas en polisilicio y el gradiente del esfuerzo ha sido validado mediante la difraccion de rayos-x. La influencia de parametros tecnologicos de dopaje y post proceso sobre las caracteristicas mecanicas de las capas ha sido estudiado.<\/p>\n<p>&nbsp;<\/p>\n<h3>Datos acad\u00e9micos de la tesis doctoral \u00ab<strong>Caracterizacion por espectroscopia raman de polisilicio para aplicacion en micromecanica.<\/strong>\u00ab<\/h3>\n<ul>\n<li><strong>T\u00edtulo de la tesis:<\/strong>\u00a0 Caracterizacion por espectroscopia raman de polisilicio para aplicacion en micromecanica. <\/li>\n<li><strong>Autor:<\/strong>\u00a0  Ben Rakkad Mohamed Said <\/li>\n<li><strong>Universidad:<\/strong>\u00a0 Barcelona<\/li>\n<li><strong>Fecha de lectura de la tesis:<\/strong>\u00a0 01\/01\/1996<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3>Direcci\u00f3n y tribunal<\/h3>\n<ul>\n<li><strong>Director de la tesis<\/strong>\n<ul>\n<li>Joan Ramon Morante Lleonart<\/li>\n<\/ul>\n<\/li>\n<li><strong>Tribunal<\/strong>\n<ul>\n<li>Presidente del tribunal:  Bailon Vega Luis Alberto <\/li>\n<li>Josep Calderer Cardona (vocal)<\/li>\n<li>Albert Cornet I Calveras (vocal)<\/li>\n<li>Joan Bausells Roige (vocal)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Tesis doctoral de Ben Rakkad Mohamed Said El silicio policristalino, material basico en el desarrollo de mems (micro-electro-mechanical-systems), ha sido [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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